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Dispositivo de producción eficiente de nanopartículas

Resumen

Tipo:
Oferta Tecnológica
Referencia:
TOES20180904001
Publicado:
24/04/2019
Caducidad:
24/04/2020
Resumen:
Un centro de investigación y una empresa especializada en I+D de tecnologías avanzadas procedentes de España han desarrollado un dispositivo de pulverización catódica por magnetrón que consigue un desgaste homogéneo del blanco y mejora la estabilidad y la tasa de producción del flujo de nanopartículas durante largos períodos de tiempo. El nuevo dispositivo consta de dos cámaras. La primera cámara, destinada a la generación de nanopartículas, combina un magnetrón FFE y una fuente de agregación. Esta configuración permite la producción estable en el tiempo del haz de nanoclústeres o nanopartículas, mejorando el uso del blanco. La segunda cámara está configurada para la sustitución de sustratos en los que se depositan las nanopartículas. Se buscan fabricantes de equipos industriales y/o de laboratorio para la licencia de la patente y la explotación comercial de la tecnología.


Details

Tittle:
Device for the efficient production of nanoparticles
Summary:
A Spanish research institution and a Spanish advanced technology R-Y-D company have developed a magnetron sputtering device where a homogeneous erosion of the target is achieved and the stability and the production rate of nanoparticle flux for long periods of time are enhanced. Industrial partners manufacturers of industrial and/or lab equipment are being sought to collaborate through a patent license agreement for commercial exploitation of technology.
Description:
Planar magnetron sputtering is widely used in the generation and deposition of nanoclusters because of the high rate and wide area of deposition. However, the magnetron discharge plasma is not uniform so the total target utilization is only about 10% due to the narrow and deep groove erosion on the target, known as a racetrack, decreasing its lifetime.

The new device, developed by a Spanish research institution and a Spanish advanced technology R-Y-D company, comprises two chambers. The first chamber, devoted to the generation of nanoparticles, combines an FFE magnetron with a gas aggregation source. This arrangement allows the stable production of nanoclusters or nanoparticles beam overtime improving the use of the target. The injection of other gases in this chamber, apart from the sputtering gas, increases both, the stability and the production rate of the nanoparticle flux. The second chamber is arranged for the substitution of the substrates where the nanoclusters are deposited.
Industrial partners are being sought. In particular, companies which manufacture industrial advanced technology equipment and/or lab equipment. The collaboration would involve a license agreement for commercial exploitation of the technology.
Advantages and Innovations:
-The weight consumption of the target is higher with respect to that of the standard magnetron sputtering.
-The target wear is much more uniform. It avoids the formation of a narrow racetrack preventing a reduction of NP beam intensity.
-A longer use of the target is achieved. The target used in the FFE magnetron has been operated during more than 12 hours at an average power of 90 W without the need to be exchanged.
-Higher stability of the nanoparticle flux over long periods of working time.
-Nanoclusters or nanoparticles of conductive, semiconductive or insulating materials can be obtained (e.g.: Au, Ag, Cu, C; Si, SiC. Likewise, a wide range of substrates can also be used.
Stage of Development:
Available for demonstration
IPs:
Patent(s) applied for but not yet granted
CommeR Statunts Regarding IPR Status:
European patent filed

Partner sought

Type and Role of Partner Sought:
Industrial partners are being sought. In particular, companies which manufacture industrial advanced technology equipment and/or lab equipment. The collaboration would involve a license agreement for commercial exploitation of the technology.

Client

Type and Size of Client:
R&D Institution
Already Engaged in Trans-National Cooperation:
No
Languages Spoken:
English
Spanish

Keywords

Technology Keywords:
02007022 Conductive materials
02007010 Metals and Alloys
05005 Micro y nanotecnología
02007024 Nanomaterials
02002015 Surface treatment (painting, galvano, polishing, CVD, ..)