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Dispositivos RF-MEMS (sistemas microelectromecánicos de radiofrecuencia) para entornos estratégicos y adversos empleados como sensores inalámbricos sin baterías


Oferta Tecnológica
Una start-up francesa diseña, fabrica y vende componentes pasivos de radiofrecuencia (RF) basados en transductores de onda elástica y vibraciones acústicas. La empresa dedica un gran esfuerzo en I+D al desarrollo de sensores capaces de operar en entornos adversos y desarrolla competencias en el campo de sistemas MEMS (microelectromecánicos), especialmente para la fabricación de materiales compuestos que combinan obleas piezoeléctricas delgadas unidas a una sola oblea de cristal. Se buscan empresas con el fin de probar nuevos desarrollos y adaptar sus tecnologías a nuevos requisitos.


RF-MEMS (radio-frequency micro electromechanical systems) devices for strategic and harsh environments as battery-less and wireless sensors
A French start-up designs, manufactures and commercializes passive RF (radio-frequency) components based on elastic wave transducers and acoustic vibrations. The company dedicates a strong R&D effort for the development of sensors capable to operate under very harsh environment. The company is looking for cooperation with industries to test new developments and adapt its technologies to new requirements.
The company, is exploiting technological equipments for the fabrication of surface acoustic wave (SAW) resonators, filters and sensors addressing all applications requiring such components (telecommunications, defense/aeronautics...). The company also specialises in development of communicating smart sensors for industrial or mass-market applications. A specific know-how has been developed for RF (radio-frequency) components adapted to harsh environments (sensors working with more than 500°C, filters and resonators for embedded missions, spatial or defense applications, radar applications, metrology, mobile telephony...).

The company is the unique operator of an industrial technology platform owned by the University of Franche-Comté and mainly dedicated to SAW manufacturing. This platform is equipped with high-precision non-contact lithography machines, thin layer deposition and surface micro-machining facilities (wet and dry - plasma aided - etching) and several characterization set-ups. This technology allows the start-up to manage prototype and small series fabrication but is willing to produce larger series in the long term.

In that context, the company develops new competences in the field of MEMS (micro electromechanical systems), particularly for the fabrication of composite materials combining piezoelectric thinned wafers bounded to any single crystal wafer. This activity is developed in close collaboration with FEMTO-ST, a scientific and technological research organisation headed by CNRS, University of Franche-Comté, ENSMM and UTBM.

The company benefits from a solid experience in the design and fabrication of such devices for prototyping and small series. The company also currently integrates facilities and know-how for on-trench ferroelectric domain engineering using LiNbO3 (lithium niobate) and LiTaO3 (lithium tantalate) substrates for both RF (radio-frequency) and optics markets and acts as a foundry for non-standard materials and related technologies.

More specifically, the company dedicates a strong R&D effort for the development of battery-less and wireless sensors capable to operate under very harsh environment, particularly high temperature conditions with a target at 1000°C. In that pursuit, the company exploits results based on SAW sensors designed to operate above 500°C (700°C demonstrated) for which a new solution for sensor/antenna assembly has been developed and protected (as a result of a European project ).
Advantages and Innovations:
The theoretical design and analysis tools it uses for developing its activity are unique and enable one to address almost any wave guide configuration.
Stage of Development:
Available for demonstration
Exclusive rights
CommeR Statunts Regarding IPR Status:
The company has acquired two exclusive patent licenses from CNRS related to harsh environment applications.

A patent covering new developments is under preparation.

Partner sought

Type and Role of Partner Sought:
Industrial partners from the Defense / Aerospace sectors or industrial equipment instrumentation / metrology

with needs in measurement and development of new radio-frequency components

willing to test new developments and adapt the technology to new requirements.


Type and Size of Client:
Industry SME <= 10
Already Engaged in Trans-National Cooperation:
Languages Spoken:


Technology Keywords:
02007012 Materiales ópticos
05005 Micro y nanotecnología
02002016 Microingeniería y nanoingeniería
01002005 Tecnología de alta frecuencia, microondas