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Experiencia en ingeniería y capacidad de producción para desarrollo y fabricación de sistemas microelectromecánicos y dispositivos microfluídicos

Resumen

Tipo:
Oferta Tecnológica
Referencia:
TONL20141121004
Publicado:
02/12/2014
Caducidad:
02/12/2015
Resumen:
Una pyme holandesa especializada en el desarrollo y fabricación de sistemas microelectromecánicos y dispositivos microfluídicos ha desarrollado una plataforma innovadora que combina diseño y producción de microestructuras en 3D con proceso de unión a temperatura ambiente. Las principales ventajas incluyen capacidad de grabado, procesamiento láser y unión de materiales diferentes. Para desarrollar estructuras en 3D sobre diferentes tipos de superficies (vidrio, silicio, metal y cerámica) se utiliza un equipo de proceso en seco. La empresa busca socios con el fin de fabricar microsistemas avanzados y establecer acuerdos comerciales con asistencia técnica.

Details

Tittle:
Engineering expertise and production capabilities for the development and production of Micro-Electro-Mechanical systems and microfluidic devices.
Summary:
A Dutch SME is specialized in the development and production of Micro-Electro-Mechanical systems and microfluidic devices. The SME offers an innovation platform that combines the design and production of 3 dimensional microstructures with an ambient temperature bonding process. Main advantages are accelerated etch capability, laser processing and bonding of mismatched materials. The SME is interested in commercial agreements with technical assistance to produce advanced microsystems.
Description:
A Dutch SME, as partner of an international group, is specialized in the development and production of advanced microfluidic and Micro-Electro-Mechanical systems (MEMs). The development of advanced microfluidic components and devices and MEMS is based on the availability of an innovation platform with a toolbox. The most important tools in the toolbox are:
1. The design and production of 3 dimensional microsystems
2. An ambient temperature bonding process.
3. A Photo Sensitive Glass Ceramic (PSGC) material.
4. Advanced laser structuring of various materials
The importance of the four tools is explained below.

The design and production of 3 dimensional microsystems.
Dry process equipment is used to make 3D structures on a variety of substrates such as Glass, Silicon, Metals, and Ceramics. These structures can be placed in substrates quickly and mask free unlike standard etching or (expensive) DRIE (Deep Reactive Ion Etch) alternatives.

An ambient temperature bonding process.
A revolutionary bonding process has been developed, which provides a unique and unparalleled method to bond several materials with different melting points (such as glass-to-ceramic, glass-to-glass, glass-to-metal, glass to plastics, glass to silicon, ..) without the use of adhesives or high temperatures.
The bonding process can be used to embed sensitive materials, such as fluids, gasses and even living organisms in enclosed cavities.
Parts of the bond joint can be made electrically conducting, thus forming electrical leads, during the actual bonding process. This greatly simplifies:
· The control of electro wetting properties in components.
· The control of electrophoresis devices.
· The connection to temperature sensors and heaters.
· The connection to particle counters or biological cell sensors.

A Photo Sensitive Glass Ceramic (PSGC) material.
By applying UV Light at certain frequencies, the PSGC- glass ceramic is converted to a ceramic material that is much more soluble in a wet etchant (HF) than the native glass material. This accelerated etch capability allows significantly steeper wall angles compared to other conventional wet etching methods. Important characteristics of this material are:
· Micro-structurable: Direct 3D write with a laser or via the use of an UV mask exposure.
· Anisotropic etching enables very high aspect ratio structures (steep wall angles)
· Temperature resistant, chemically stable, biocompatible.
· Available in the transparent- or ceramized state.
· Relatively quick production of microstructures without masks, photoresist, deep reactive ion etching (DRIE) or substantial upfront costs is possible.

Products and processes for the advanced microfluidic systems and MEMs market segments.
On the basis of above mentioned tools, it is possible to develop and produce a wide variety of new microbiological, mechanical, electrical and optical components, products and processes for the advanced microsystems and MEMs.
Examples of market segments with a lot of prototyping activity and products are:
· Biochip, lab on a chip systems
· Encapsulation / packaging of chips and/or sensors
· Nano-scale motion control platforms
· Semicon components (3D microstructures, MEMS, .....)
· Microfluidic structures and devices, microreactors for mixing and separation
· Channel and nozzle systems such as chemically inert inkjet print-heads
· Components based on electrowetting
· Components with heat transfer functionalities
· Titerplates.
· Customer specific glass components.

Another market segment with a lot of activity is the development of machines for special process steps like customized bonding machines.

The Dutch SME is looking for partners interested in the development of prototypes, process steps and products to come to next generation of microfluidic systems and MEMs.
The SME is interested in commercial agreements with technical assistance to develop and produce advanced microsystems.
Advantages and Innovations:
The innovations are:
· Deep 3 dimensional structuring of glass, ceramic and metaloxides.
· An ambient temperature bonding process, which enables encapsulation of fluids and incorporation of electrical leads within the bond joint.
· A photo sensitive glass ceramic (PSGC) material.
· Advanced laser structuring of a whole range of materials.

A number of advantages are:
· Accelerated etch capability.
· High aspect ratio capability, steep wall angles in microstructure and high density hole plates.
· No use of high temperatures: bulk material stays at room temperature..
· Chemically inert and stable.
· Biocompatible.
· Relatively low cost.
· 'Green processing': uses very little energy and resources.
· Usable for a wide variety applications, also in high volume production environments.
· Robust.
Stage of Development:
Already on the market
IPs:
Patents granted

Partner sought

Type and Role of Partner Sought:
Type
Industry

Partners:
Companies that are interested in the development of prototypes, process steps and products to come to next generation of microfluidic systems and MEMs.


Role of the partner:
The co-development of prototypes, products and process steps to come to enduser applications using MEMs and microfluidic systems.
The SME is interested in commercial agreements with technical assistance to develop and produce advanced microsystems.

Client

Type and Size of Client:
Industry SME 50-249
Already Engaged in Trans-National Cooperation:
No
Languages Spoken:
Dutch
English
German

Keywords

Technology Keywords:
03003 Ingeniería de aparatos
05005 Micro y nanotecnología
06004 Micro y nanotecnología relacionada con las ciencias biológicas
02002018 Microensamblaje, nanoensamblaje
02007024 Nanomateriales