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Muestra para calibrar sistemas de medición de la velocidad de desgasificación

Resumen

Tipo:
Oferta Tecnológica
Referencia:
TODE20140930003
Publicado:
07/10/2015
Caducidad:
06/10/2016
Resumen:
Un instituto de investigación alemán ha desarrollado un sistema para calibrar sistemas de medición de la velocidad de desgasificación. Las mediciones fiables y cuantitativas de las velocidades de desgasificación de componentes al vacío han adquirido importancia en diferentes áreas, como industria de semiconductores y espacial o fabricación de plantas al vacío, porque los gases traza pueden causar interacciones con procesos técnicos. Gracias a su compacidad, la muestra puede colocarse en la misma posición que el objeto de medición. Esta muestra evita realizar mediciones dobles en distintos sistemas. El instituto busca licenciatarios.

Details

Tittle:
Sample for the calibration of outgassing rate measurement systems
Summary:
A German research institute has developed a system for the calibration of outgassing rate measurement systems, additionally the traceability on a national normal is enabled. Reliable, quantitative measurements of outgassing rates of vacuum components have gained importance in application areas as i.e. semiconductor- and space industry and production of vacuum plants. The sample makes dual measurements on different systems unnecessary. The German research institute is searching for licensees.
Description:
A German research institute has developed a system for the calibration of outgassing rate measurement systems. Outgassing managements gain increasing importance in recent years in branches as semiconductor- and space industry and production of vacuum plants and semiconductor- and space industry and production of vacuum plants. The device enables the traceability on a national normal and makes dual measurements on different systems unnecessary. The compact layout of the device makes it suitable for various application scenarios.
The determination of the outgassing rate in vacuum systems has great importance, as remaining trace gases may cause interactions with intended technical processes. Yet quantitative outgassing rate measurements lack of the necessary metrology quality of the quadrupole mass spectrometer, standards for measurement processes are missing and measuring values are not traceable. Current outgassing rate measurements processes are partially not easy to compare and not precise.
One example is the EUV lithography, as currently x-ray mirrors are oxidizing very fast if water vapour and hydrocarbons exist, which makes the lithography-process uneconomically.
The new developed sample for the calibration of outgassing rate measurement systems delivers a precise, constant and offer years only slow sinking gas flow. The sample is determined for the outgassing of single gases as well as gas mixtures. The possible outgassing rates, between 10-8 Pa L/s and 10-4 Pa L/s, are similar to the ones of currently available vacuum components. Due to its compact layout the sample can be placed on the same position as the measurement object, hereby a calibration of the system is possible before each measurement.
The sample for the calibration of outgassing rate measurement systems can be used for validation and calibration of outgassing rate measurement systems in the HV and UHV area as well as for comparison measurements of different apparatuses. Additionally partial pressure measuring devices can be calibrated if the pumping speed of the vacuum systems is known.
"Local" solutions for branches as semiconductor- and space industry and production of vacuum plants and semiconductor- and space industry and production of vacuum plants will become unnecessary, as the new developed sample enables a calibration of the systems and the results become comparable. Double measurements on different systems become unnecessary.
Advantages and Innovations:
The sample offers the following advantages:
- possible continuous outgassing rates, between 10-8 Pa L/s and 10-4 Pa L/s
- Comparability of measurements on different locations and systems
- traceability on a national normal
Stage of Development:
Field tested/evaluated
IPs:
Patent(s) applied for but not yet granted

Partner sought

Type and Role of Partner Sought:
- Type of partner sought: industry

- Specific area of activity of the partner: Development and product of measurements systems and standards, especially in the vacuum branch

- Task to be performed by the partner sought:
Use the offered technology as licensee.

Client

Type and Size of Client:
R&D Institution
Already Engaged in Trans-National Cooperation:
Si
Languages Spoken:
English
German

Keywords

Technology Keywords:
02011005 Exploración y tecnología espacial
09005 Materiales de referencia
01002012 Semiconductores
05003003 Vacío