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Tecnología de sensores/películas finas


Oferta Tecnológica
Una spin-off alemana dirige proyectos de investigación y desarrollo básicos y orientados a aplicaciones en el campo de sensores industriales. Gracias a una plataforma tecnológica recientemente desarrollada, la empresa ofrece sensores de fuerza, presión y térmicos y caudalímetros altamente sensibles. Se buscan socios industriales con el fin de establecer acuerdos de cooperación técnica y participar en proyectos de investigación conjunta, así como acuerdos comerciales con asistencia técnica.


Sensor technology / thin films

A German spin-off conducts fundamental as well as application-oriented research and development for industrial sensor applications. Based on a new developed technology platform, they can offer highly sensitive force, pressure and thermal sensors as well as flowmeters. Industrial partners are sought for technical cooperations and common research projects. Commercial agreements with technical assistance are also possible.

The German spin-off of the Saarland University is working on novel nanoscale functional sensor layers. So-called granular metals reveal interesting physical properties and a great potential for applications. Granular metals consist of nanoscale clusters of metal (like nickel) that are embedded in a matrix of some material with poor electrical conductivity (like carbon). It turns out that the electrical resistance of such materials is influenced much more by mechanical strain and compression compared to well-known metallic sensor layers. Based on this technology the spin-off develops sensor layers with high-sensitivity and higher operating temperature.

The deposition processes based on physical and chemical vapor sputtering are developed as well. The focus is put on sensor technology for mechanical quantities such as pressure, strain, force, weight, flow and torque as well as thermal quantities.

The spin-off can provide knowledge and know-how to develop new innovative products, which rely on superior sensor technology. Therefore, they are looking for industrial partners who are interested in high sensitive sensors. Agreements for technical cooperations and common research projects are sought. Commercial agreements with technical assistance are also possible.
Advantages and Innovations:

Sputtering technology:
The set of plasma coating systems is used for research as well as small-scale production. Thin film composites of up to four different materials can be produced.

Thin film strain gauges:
Granular metals deposited on polyimide foil yields strain gauges with high-sensitivity.
These strain gauges can be attached to a variety of substrates in order to measure slight deformations of the material and convert them to an electrical signal.
Applying the strain gauges onto a bending beam yields industry-grade load cells which provide an electrical signal 10 times as high as standard force transducers.

Membrane based pressure sensors:
Industrial sensors (pressure ranges from some bar to some thousand) are based on stainless steel. At first an insulating layer is deposited on the membrane, followed by the deposition of sensor- and contact layers that have to be structured.
The spin-off proposes to use functional layers with high sensitivity. The overload security is enhanced and it becomes possible to use ceramic instead of steel. Just one layer is necessary to deposit and the Wheatstone bridge is simply written in the layer by means of a special laser.

The sensor layer is cut by a picosecond laser to create a bridge structure with a resistance of 3 to 10k^ without the need for photolithography. A laser-friendly layout was developed that requires a minimal process time.
By using high performance ceramic ZrO2 for the pressure sensor body, no insulating layer is required and insulation faults are virtually impossible. To contact the functional layer directly, wedge bonding of aluminum wire is carried out. Pressure sensors fabricated by this procedure exhibit a sensitivity of up 10 to 30 mV/V depending on the conditions.
Stage of Development:
Available for demonstration
Secret Know-how,Patents granted
CommeR Statunts Regarding IPR Status:
The technology is protected with several patents in Germany and Europe.

Partner sought

Type and Role of Partner Sought:

The spin-off can provide knowledge and know-how to develop new innovative products, which rely on superior sensor technology. Therefore, they are looking for industrial partners who are interested in high sensitive sensors


Type and Size of Client:
Already Engaged in Trans-National Cooperation:
Languages Spoken:


Technology Keywords:
09001010 Ensayos de material térmico
09001002 Métodos e instalaciones de ensayo / análisis
09001008 Otros ensayos no destructivos
09003 Sistemas electrónicos de medida
09001009 Tecnología de sensores relacionada con la realización de medidas