Con esta herramienta te facilitamos un acceso a todas las ofertas y demandas de tecnología europeas y a búsquedas de socios para participar en propuestas europeas de I+D publicadas en la red Enterprise Europe Network, pudiendo filtrar los resultados para facilitar las búsquedas más acordes con tus necesidades.

¿Quieres recibir estos listados de oportunidades de colaboración en tu correo de forma periódica y personalizada? Date de alta en nuestro Boletín

Para optimizar los resultados de la búsqueda, se recomienda utilizar términos en inglés.

Sensores de presión de alta precisión para medios líquidos agresivos basados en membrana de silicio con nanocapas protectoras de carbono adiamantado

Resumen

Tipo:
Oferta Tecnológica
Referencia:
12 RU 86FG 3OSM
Publicado:
23/06/2015
Caducidad:
30/12/2015
Resumen:
Un instituto de investigación ruso ha diseñado sensores de presión hidrostática basados en membranas de silicio con nanocapas protectoras de carbono adiamantado y procesamiento de señales que ofrece una accesibilidad dentro de un rango de temperatura de -40...+50°C. Estos sensores presentan como ventaja la capacidad de operar en entornos agresivos sin destruir la membrana, así como la reducción de costes de fabricación en comparación con sus análogos. Se buscan socios interesados en establecer acuerdos de cooperación técnica.

Details

Tittle:
High-precision overpressure pressure sensors for fluid aggressive media with silicon membrane sensing elements with protective diamond-like carbon nano-layers
Summary:
A research institute from Moscow has designed hydrostatic pressure sensors based on silicon membranes with protective diamond-like carbon nano-layers and microprocessing signal processing, which provides 0,05-25 kPa reachability within -40...+50°C temperature range. The sensors' advantage is the ability operate in aggressive media without membrane destruction and reduced fabrication costs, as compared to analogs. The institute seeks partners for technical cooperation agreement.
Description:
Currently, the most widely used sensors are those based on silicon membranes with sensor elements.
When the sensors are used in aggressive environments, the side containing the microchip should be protected. Nowadays, in most cases the crystal is protected by separating stainless steel membranes. Such membranes transfer force to the crystal through a special parting fluid. As a result, membranes' metrological characteristics inevitably deteriorate. Moreover, there is a risk of gas release in the parting fluid. Furthermore, these technologies are poorly compatible and do not provide the possibility to implement group operations in the production process. All these factors increase the product costs. As a result, the initial small integral pressure transformer turns into a bulky and mechanically complicated modular assembly with a high cost.
The design of the offered sensor modules allows connection to the measurable media from the crystal reverse side. Thus, there is the possibility to work with aggressive media without use of separating metal membrane with fluid isolation. The offered optimized crystal technology and pressure modules based on it allow efficient use of high mechanical properties of single-crystal silicon, i.e. extremely low mechanical hysteresis, good repeatability of results and long-term stability.


Current and Potential Domain of Application: Application of protective layers will allow significant extension of the pressure sensors' scope of use. It will allow using the sensors to measure the level, gravity and weight of fuel in containers, at gas stations and in rail tank cars. And the exclusion of metal protective membranes from the sensing elements design will increase the precision of sensors.
Current and Potential Domain of Application
Application of protective layers will allow significant extension of the pressure sensors' scope of use. It will allow using the sensors to measure the level, gravity and weight of fuel in containers, at gas stations and in rail tank cars. And the exclusion of metal protective membranes from the sensing elements design will increase the precision of sensors.
Advantages and Innovations:

The innovation of the sensor element technology is application of protective diamond-like carbon structured nano-layers onto the exposed surface of the silicon membrane. Due to using this technology, it is possible for group application of ultra-fine layers of nanocomposite carbon materials with high (up to 75%) diamond phase content. Due to unique properties as mechanical strength and chemical stability at nano-thicknesses, a reliable protection of silicon membranes is ensured without any deterioration of their electromechanic properties. This provides excellent precision characteristics of the pressure sensors at a minimum cost.
Stage of Development:
Under development/lab tested
IPs:
Secret know-how

Partner sought

Type and Role of Partner Sought:
- Type of partner sought: Industry

- Specific area of activity of the partner: enterprises that have need to control overpresure in aggressive fluid and gaseous media

- Task to be performed by the partner sought: The institute can produce pressure sensors and apply protective diamond-like carbon nano layers on them to the partner's specification. Joint further upgrade of the sensors and technology adaptation to the partner's needs can also be provided.
Type of Partnership Considered:
Adaptation to specific needs
Joint further development

Client

Type and Size of Client:
R&D Institution
Already Engaged in Trans-National Cooperation:
No

Keywords

Technology Keywords:
01001 Electrónica, microelectrónica